Silane, a compound of silicon and hydrogen, is a generic term for a range of compounds, including methyl silane (SiH4), Ethyl silane (SI2H6) and some more advanced silicone hydrogen compounds. At present, the most used is methyl silane.
Methyl silane is generally referred to as silane. Silane as a source of silicon components, can be used to produce high-purity polysilicon, monocrystalline silicon, microcrystalline silicon, amorphous silicon, silicon nitride, silicon oxide, heterogeneous silicon, various metal silicide. Because of its high purity and fine control, it has become an important special gas which cannot be replaced by many other silicon sources. Silane is widely used in microelectronics and optoelectronics industries for the manufacture of solar cells, flat panel displays, glass and steel coatings, and is the only intermediate product of large-scale production of granular high-purity silicon in the world so far. The High-tech applications of silane are still emerging, including for the manufacture of advanced ceramics, composites, functional materials, biological materials, high-energy materials, etc., and become the foundation of many new technologies, materials and devices. Silane is also known for its unique spontaneous combustion and explosive. Silane has a very wide spontaneous ignition range and extremely strong burning energy, which determines that it is a high risk gas.